YBa2Cu3O7-x thin films were deposited by excimer laser ablation with three different kinds of film-cooling processes. The films cooled under 300 Torr of oxygen pressure and 200 mTorr of oxygen pressure with dc discharge assistance were superconductive. The zero-resistance temperatures were 86.5 K and critical current densities in zero field at 77 K were more than 10(6) A/cm2, while the films cooled under 200 mTorr of oxygen pressure were semiconductive.