Journal of Vacuum Science & Technology A, Vol.12, No.3, 718-722, 1994
Study of the Time-Dependence of Differentially Sputtered Currents from Multiphase Powder Targets
The time dependence of differentially sputtered currents from a multiphase powder target is studied both theoretically and experimentally. A model for the powder particle distribution is presented which allows an analytic solution for a mixture containing two or more phases. The calculated time dependence of the currents is exponential. This is in agreement with experimental data obtained using sputtering from a three phase target.
Keywords:ELECTRON