화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.12, No.4, 915-920, 1994
Some Important Developments in Capture Pumping Technology in the Last 40 Years
Highlights of the history of capture pumping technology are given. The subjects covered include some of the important chronological developments in sputter-ion, electrostatic-ion, sublimation, nonevaporable getter, and cryogenic pumping in the last 40 years. All of these forms of pumps proved to be essential tools for the attainment of ultrahigh vacuum.