Journal of Vacuum Science & Technology A, Vol.12, No.4, 1229-1236, 1994
Modeling and Simulation of Glow-Discharge Plasma Reactors
Large scale numerical simulations of the spatiotemporal plasma flow in low-pressure (0.1-1 Torr) radio-frequency capacitively coupled reactors were performed using a global plasma reactor model. Two-dimensional argon glow discharge simulations coupled with neutral (metastable) transport and reaction provided insight on the discharge structure and radial plasma uniformity. A one-dimensional simulation of a strongly electronegative (Cl2) discharge was also performed using the global model. Global model results suggested a "boundary layer" approach in which the reactor is separated into two regions : bulk plasma and sheath. The two-region model was applied successfully to the Cl2 discharge.
Keywords:ARGON RF DISCHARGE;CONTINUUM MODEL;FLUID MODEL;NUMERICAL-SIMULATION;ETCHING REACTOR;DENSITY;FLOW;O2;N2