Journal of Vacuum Science & Technology A, Vol.12, No.4, 1241-1243, 1994
Super-Wide Electron-Cyclotron-Resonance Plasma Source Excited by Traveling Microwave as an Efficient Tool for Diamond-Like Carbon-Film Deposition
An electron cyclotron resonance (ECR) plasma source which generates 500-mm-wide plasma has been developed. A divergent magnetic field sufficient for ECR is generated by permanent magnets and a solenoid coil. A 2.45-GHz traveling microwave is supplied through a long slot antenna prepared in the sidewall of the waveguide and excites ECR plasma. This apparatus is applied to the diamondlike carbon (DLC) films deposition and DLC films were deposited in a wide zone 320 mm in width.