Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.5, 2938-2939, 1994 DOI10.1116/1.578971 Export Citation Noninvasive Infrared-Based Measurement of the Temperature of GaAs Semiconductors Crystals Malam SC, Pell T, Nix RM Please enable JavaScript to view the comments powered by Disqus.