Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3102-3108, 1994 DOI10.1116/1.578943 Export Citation Measurements of Radical Densities in Radiofrequency Fluorocarbon Plasmas Using Infrared-Absorption Spectroscopy Haverlag M, Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ Keywords:DIODE-LASER ABSORPTION;CF2;DISCHARGE;PRESSURE;BANDS;SI Please enable JavaScript to view the comments powered by Disqus.
