Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3115-3119, 1994 DOI10.1116/1.578945 Export Citation Spatial Distributions of Electron-Density and Temperature in Audio Frequency and Radio-Frequency Magnetron Glow-Discharges Fusselman SP, Yasuda HK, Javedani JB, Chiang J, Prelas MA Keywords:LANGMUIR PROBE MEASUREMENTS;PLASMAS Please enable JavaScript to view the comments powered by Disqus.
