Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3120-3125, 1994 DOI10.1116/1.578946 Export Citation Fourier-Transform Infrared-Absorption Spectrometry Measurements of a CF4 Discharge in an Electron-Cyclotron-Resonance Reactor Goeckner MJ, Henderson MA, Meyer JA, Breun RA Keywords:PLASMA;ION;SPECTROSCOPY;TEMPERATURE;DEPOSITION;PROBE Please enable JavaScript to view the comments powered by Disqus.
