Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3126-3130, 1994 DOI10.1116/1.579225 Export Citation Diagnostics and Control of Radiofrequency Glow-Discharge Mutsukura N, Fukasawa Y, Machi Y, Kubota T Keywords:RF DISCHARGE;PLASMA;SHEATH Please enable JavaScript to view the comments powered by Disqus.
