Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3137-3145, 1994 DOI10.1116/1.579227 Export Citation Observations of Particle Layers Levitated in a Radiofrequency Sputtering Plasma Praburam G, Goree J Keywords:PARTICULATE CONTAMINATION;RF DISCHARGES;SILANE;GENERATION;ARGON Please enable JavaScript to view the comments powered by Disqus.
