Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3200-3204, 1994 DOI10.1116/1.579238 Export Citation Existence of Structural Inhomogeneity in Ion-Beam-Modified Polyimide Films Xu XL, Xu D, Xu HL, Wang R, Zou SC, Du GD, Xia GQ Keywords:RAMAN-SCATTERING;CARBON-FILMS;SPECTROSCOPY;POLYMERS;CONDUCTIVITY;IMPLANTATION Please enable JavaScript to view the comments powered by Disqus.
