Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.1, 101-112, 1995 DOI10.1116/1.579874 Export Citation Monte-Carlo Simulation of the Thermalization of Sputtered Atoms and Reflected Atoms in the Magnetron Sputtering Discharge Yamamura Y, Ishida M Keywords:ENERGY-DISTRIBUTIONS;PARTICLE FLUXES;DEPOSITION;COLLISIONS Please enable JavaScript to view the comments powered by Disqus.
