Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 436-441, 1995 DOI10.1116/1.579376 Export Citation Role of Residual Casting Solvent in Determining the Lithographic and Dissolution Behavior of Poly(Methylmethacrylate) Criss R, Cunningham AJ Keywords:POLY(METHYL METHACRYLATE);ELECTRON;RESIST Please enable JavaScript to view the comments powered by Disqus.
