Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 894-899, 1995 DOI10.1116/1.579848 Export Citation Monitoring InP and GaAs Etched in Cl-2/Ar Using Optical-Emission Spectroscopy and Mass-Spectrometry Thomas S, Ko KK, Pang SW Keywords:PLASMA;SEMICONDUCTOR;SMOOTH [Referenced By] Please enable JavaScript to view the comments powered by Disqus.
