Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 935-942, 1995 DOI10.1116/1.579654 Export Citation Ion and Neutral Argon Temperatures in Electron-Cyclotron-Resonance Plasmas by Doppler-Broadened Emission-Spectroscopy Tsu DV, Young RT, Ovshinsky SR, Klepper CC, Berry LA Keywords:MAGNETIC-FIELD;DISTRIBUTIONS;ENERGIES Please enable JavaScript to view the comments powered by Disqus.
