Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1136-1144, 1995 DOI10.1116/1.579600 Export Citation Surface-Analysis at Low to Ultrahigh-Vacuum by Ion-Scattering and Direct Recoil Spectroscopy Hammond MS, Schultz JA, Krauss AR Keywords:ATOMIC LAYER EPITAXY;ENERGY;SPECTROMETRY;PARTICLES;SPECTRA Please enable JavaScript to view the comments powered by Disqus.
