Journal of Vacuum Science & Technology A, Vol.13, No.3, 1325-1330, 1995
Nondestructive and Quantitative Depth Profiling Analysis of Ion-Bombarded Ta2O5 Surfaces by Medium-Energy Ion-Scattering Spectroscopy
Keywords:MONTE-CARLO SIMULATION;COMPOSITIONAL CHANGES;OXIDES;SEGREGATION;RESOLUTION;ALLOYS;O-2+;MASS;SI