The sputtering yield of accelerated CO2 cluster ions impinging on surfaces of various materials is investigated. For copper, it varies proportionally to the second power of the energy between 156 and 260 keV. The rate of erosion for different target materials varies by two orders of magnitude from tungsten to polymethylmethacrylate. Diamond is eroded fairly quickly, while aluminum is eroded less than corundum (Al2O3). NO Simple correlation of the sputtering yield on the bulk properties of target materials is found. For copper, the angular distribution of sputtered material is measured and found to be following a roughly cosine distribution. By using masks, different microstructures have been produced in cobalt-samarium magnets, diamond, and glass.