X-ray diffraction measurements and scanning electron microscopy studies on close to stoichiometric titanium carbonitride [TiCxN(1-x)] and carbon containing tungsten coatings produced in an electron enhanced unbalanced magnetron system have been undertaken. These coatings are deposited as interlayers to improve adhesion and load support for metal diamondlike carbon (DLC) multilayers. In this study, however, only the interlayer without the top coating (metal DLC) was deposited to study and optimize this layer. The films were deposited on stainless steel substrates with an argon background pressure in the range of 0.1 Pa, introducing acetylene while sputtering tungsten and a mixture of acetylene and nitrogen while sputtering titanium. The chemical composition of the film was analyzed by a glow discharge optical spectrometer. The peak positions and integral breadth and shape parameters were determined by x-ray diffraction. Microhardness, scratch adhesion, and the tribological performance under sliding wear have been determined and correlated with the chemical composition and microstructure of the films. An optimized TiCxN(1-x) load support and adhesive interlayer could be identified.