Journal of Vacuum Science & Technology A, Vol.14, No.4, 2102-2105, 1996
Vacuum-Ultraviolet Emission from Radio-Frequency Plasmas of SF6 and CF4
The vacuum ultraviolet and ultraviolet emission (115 nm
Keywords:CONTROLLED ELECTRON-IMPACT;DISSOCIATIVE EXCITATION;UV EMISSION;COLLISIONS;HYDROGEN;HELIUM;ION