화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.14, No.4, 2669-2670, 1996
Minimum Profile Ultrahigh-Vacuum Gate Valve Based on Linear/Rotary Motion Feedthrough
A simple, very low profile (< 1 in.) ultrahigh vacuum gate valve for isolation of molecular beam sources is described. The radial gate drive is based upon a linear/rotary motion feedthrough. A novel coupling scheme is described where the linear motion is used to translate the gate while the rotary motion is used to independently raise and lower the gate. A molecular beam skimmer, mounted on the gate, may be accurately and reproducibly located.