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Journal of Vacuum Science & Technology A, Vol.14, No.5, 2687-2692, 1996
X-Ray Photoelectron-Spectroscopy Characterization of Radio-Frequency Reactively Sputtered Carbon Nitride Thin-Films
Carbon nitride thin films prepared by radio frequency reactive sputtering of graphite in pure nitrogen plasma have been characterized by x-ray photoelectron spectroscopy (XPS) for probing the chemical bonding in the films. The multiple binding energy values obtained for the C 1s and N 1s photoelectrons in the film suggest that both the C and N atoms exhibit at least three types of chemical states, manifestative of different types of the C-N bonding present in the material. The presence of theoretically predicted beta-C3N4 phase in our C-N films has been suggested on the basis of XPS and optical data.
Keywords:ENERGY NITROGEN IMPLANTATION;STRUCTURAL-PROPERTIES;VAPOR-DEPOSITION;ION;GRAPHITE;MICROSTRUCTURE;BETA-C3N4;SOLIDS;GROWTH