화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.14, No.6, 3208-3213, 1996
Schiff-Base Precursor Compounds for the Chemical Beam Epitaxy of Oxide Thin-Films .1. Deposition of CuO on MgO(001) Using Copper(II) bis(Benzoylacetone)-Ethylendiimine
A new precursor compound for the deposition of copper oxide thin films under molecular beam conditio us, copper bis(benzoylacetone)-ethylenediimine, has been characterized by thermal analysis and in situ mass spectrometry. Its stability and decomposition behavior are reported as well as its use for the deposition of epitaxial cooper oxide thin films on MgO.