화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.1, 201-205, 1997
Safety Interlock and Remote Computer Monitoring for a Diffusion-Pumped Vacuum-System
A safety interlock system for a diffusion-pumped ultra-high vacuum chamber is presented. It controls and monitors vacuum system valves, diffusion pumps, liquid nitrogen filling, chilled water how, and pressures in the chamber. The interlock system is interfaced with a phone dialer and a personal computer to provide remote monitoring and diagnostics of the vacuum system. This interlock prevents many operational errors and problems due to the power and liquid nitrogen failure.