A way to circumvent the sample charging in the analysis of insulators with rough surfaces during Auger electron spectroscopy (AES) has been studied. It is very difficult to handle the charging of insulators with rough surfaces during AES because of the irregular electron accumulations on the irradiated surface. This irregularity is attributed to various incident beam angles due to the surface roughness, which produce various electron excitation volumes in an electron rastering area. The charging problem of an insulator with rough surfaces during AES could be controlled by properly selecting the analysis position and area on the top of a protrusion or a particle on the surface of the insulating sample. This simple technique uses high spatial resolution of AES and the surface topography of an insulator, aiming at reducing the electron excitation volume as well as increasing the total electron yield.