화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.3, 1089-1097, 1997
Materials Processing with Intense Pulsed Ion-Beams
We review research investigating the application of intense pulsed ion beams (IPIBs) for the surface treatment and coating of materials. The short range (0.1-10 mu m) and high-energy density (1-50 J/cm(2)) of these short-pulsed (less than or equal to 1 mu s) beams (with ion currents I=5-50 kA, and energies E=100-1000 keV) make them ideal in flash heating a target surface, similar to the more familiar pulsed laser processes. IPIB surface treatment induces rapid melt and solidification at up to 10(10) Wa causing amorphous layer formation and the producing nonequilibrium microstructures. At higher energy density the target surface is vaporized, and the ablated vapor is condensed as coatings onto adjacent substrates or as nanophase powders. Progress towards the development of robust, high-repetition rate IPIB accelerators is presented.