화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.3, 1206-1210, 1997
Determination of the Components of Stress in a Polycrystalline Diamond Film Using Polarized Raman-Spectroscopy
Polarized Raman spectroscopy is used to measure the hydrostatic and axial stress components along the [111] and [100] direction of a 2-in.-diam polycrystalline diamond film showing mainly [111] and [110] facets. The theoretical background and the instrumentation necessary to measure stress and crystal orientation are presented. Experimental examples of a [111] oriented single crystal having uniaxial stress along the [111] direction, as well as a [100] oriented single crystal having uniaxial stress along the [100] direction, are presented. The diamond Raman peak height and shift indicating hydrostatic stress are measured at 1776 different locations across the entire film. The hydrostatic stress, the axial stress along the [100] direction, and the axial stress along the [111] direction of 441 neighboring crystals of a center portion of the film are also determined. The results show a very clustered distribution of the hydrostatic and axial stress with a variation of up to 0.8 GPa.