Miniaturization of high intensity discharge lamps can lead to cheaper, more efficient, and novel lighting systems for the lighting industry. We are applying micromachining and techniques used for manufacturing integrated circuits, to develop such miniature lamps. We have fabricated electrodeless and electroded high-pressure mercury discharge lamps in quartz substrates using integrated circuit and micromachining techniques, such as photolithography, etching, and wafer bonding. Patterned quartz wafers were bonded together using fusion wafer bonding. The resulting cavities are strong enough to withstand the high pressures (124 atm) and high temperatures (1000 degrees C) in these lamps. Lamps containing varying amounts of mercury were fabricated to obtain high-pressure discharges in the range of 10-175 atm. The electrodeless lamps were excited by a microwave source, operating at 2.45 GHz and the electroded lamps with a dc voltage. Lamp efficacies over 40 lumens (lm)/W were obtained for the electrodeless lamps and over 50 lm/W for the electroded lamps. These results demonstrate that high-pressure mercury discharges can be sustained in the lamp cavities formed by micromachining techniques. In addition, these cavities are not only hermetically sealed, but can also withstand the high-pressure and high-temperature environment of high-pressure mercury discharges.