We show that it is possible to extend the lower limit of the spectral range of Fourier transform infrared-attenuated total reflection (FTIR-ATR) spectroscopy on Si surfaces from 1500 to similar to 850 cm(-1) using a Ge ATR prism coated with a thin epitaxial layer of Si, making accessible the especially important fingerprint region of organic molecules. The utility of the ATR prism is demonstrated by collecting FTIR spectra of several surface terminations of Si (H, oxide, 3-aminopropyltrimethoxysilane, and DNA) that contain peaks in the newly accessible spectral region.