Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.15, No.6, 3170-3170, 1997 DOI10.1116/1.580863 Export Citation 3-Dimensional Deposition of Tin Film Using Low-Frequency (50 Hz) Plasma Chemical-Vapor-Deposition (Vol 15, Pg 1897, 1997) Shimozuma M, Date H, Iwasaki T, Tagashira H, Yoshino M, Yoshida K Please enable JavaScript to view the comments powered by Disqus.
