The performance of a ciliary microactuator array as a positioning stage inside a scanning electron microscope is described. Such arrays are attractive because they can provide micron scale positioning resolution with direct electronic control within the sample chamber. The present array uses thermal actuation of a polyimide bimorph to produce long-travel deflection of each cilium and electrostatic actuation to provide a low-power hold-down mode. Each cell in the array consists of four orthogonally oriented cilia which, with proper drive signals, can produce object motion along any direction within the plane of the array. Adapting this array for use inside a scanning electron microscope (SEM) requires only a small mounting block and a modest multiconductor feedthrough. Improved thermal isolation within the vacuum chamber of the SEM drastically reduces the electrical input power requirements over those in air, while still allowing full positioning resolution. The addition of a gold ground plane coating to the array eliminates charging problems by the electron beam and reduces electrical interference from the drive signals.