Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.16, No.4, 2742-2743, 1998 DOI10.1116/1.581411 Export Citation Silicon oxycarbide formation on SiC surfaces and the SiC/SiO2 interface (vol A15, pg 1597, 1997) Onneby C, Pantano CG Please enable JavaScript to view the comments powered by Disqus.
