화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.16, No.5, 2901-2912, 1998
Reversible and irreversible control of optical properties of porous silicon superlattices by thermal oxidation, vapor adsorption, and liquid penetration
Optical properties of porous silicon superlattices are investigated using variable angle spectroscopic ellipsometry. Different phenomena such as in-depth inhomogeneities and interface transition regions are resolved and studied using various optical models. The optical properties of the samples are modified irreversibly by thermal oxidation yielding a blueshift of the reflectance. A reversible redshift of the spectra is obtained by vapor adsorption and liquid penetration into the superlattice. Moreover, existence of different specific internal surface areas and pore size distributions in the low and high index sublayers of the material is proposed.