Seven-layer optical multilayer filters with alternating layers of titania and silica were fabricated by helicon plasma sputtering at room temperature. The reflectance of the filters around the design wavelengths of 800 and 1300 nm are up to 95.80% and 95.32%, respectively. Their reflected bands have the full widths at half maximum of about 360 and 600 nm, respectively. The measured transmittance spectra correspond well with the calculated results based on the optical multilayer film theory with measured refractive indices of 2.44 and 1.48 for TiO2 and SiO2, respectively. Microstructures of the TiO2 and SiO2 films and TiO2/SiO2 multilayer films were investigated.