Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.16, No.5, 3145-3147, 1998 DOI10.1116/1.581474 Export Citation Phase-shift interference microscope employing a simple method to depress speckle noises for the thickness measurement of thin films Matsumoto S, Takayama K, Toyooka S, Kikuchi A Keywords:DEW-POINT HYGROMETER;LASER Please enable JavaScript to view the comments powered by Disqus.
