High-temperature NiTi1-xHfx shape memory alloy thin films with Hf contents up to 29.9 at. % were obtained by laser ablation of different composite targets. The crystal structures and phase, transformation behavior of the annealed thin films were characterized by x-ray diffraction and differential scanning calorimeter, respectively. It is found that there are two phases (martensite and austenite) in the annealed thin films. The phase transformation temperatures increase from 31 to 175 degrees C for Mp and from 97 to 228 degrees C for Ap when the Hf content (x) increases from 13.4 to 29.9 at. %. Results are also compared with those of NiTi1-xHfx bulk alloys and thin films grown by other methods.