화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.18, No.3, 992-994, 2000
Delivery of pure ozone in ultrahigh vacuum
An apparatus designed to produce and deliver pure ozone to a sample inside a metal ultrahigh vacuum apparatus is described. Ozone of 96%-97% purity is prepared in a glass vacuum system and converted to a molecular beam of known flux using an all glass doser. The storage lifetime of the O-3 at Torr pressure in the glass storage vacuum system (containing a small surface area of metal) has been measured, and it is shown that the rate of O-3 destruction during storage is inconsequential for hours of storage.