Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.11, No.6, 2123-2126, 1993 DOI10.1116/1.586553 Export Citation Nanofabrication Techniques for a 100 nm-Scale Tungsten Polycide Gate Structure Azuma T, Nakasugi T, Oogi S, Takigami Y, Oyamatsu H Keywords:SYSTEM EX-7;BEAM;TECHNOLOGY;DESIGN Please enable JavaScript to view the comments powered by Disqus.
