Journal of Vacuum Science & Technology B, Vol.11, No.6, 2352-2356, 1993
Laboratory Setup for Projection Electron Lithography and a Monte-Carlo Simulation of Scattering Mask Transmission
The progress in two areas related to scattering contrast with angular limitation projection electron lithography (SCALPEL) is reported. First, the simple modifications which have been made to convert a transmission electron microscope into a scientific SCALPEL tool, to be used for making repeated, scaled nanostructures and mesoscopic devices are discussed. Preliminary electron optical calculations for this setup predict resolution of approximately 0.005 mum for a range of demagnifications. Second, a Monte Carlo simulation of the angular distribution of electrons scattered by thin solid films is described. The simulation is intended to help select the optimum materials for use in a scattering mask. It was found that for germanium (atomic number Z=32), available parameterless single-scattering distributions do not adequately describe the experimentally measured distributions. As a result, an experimentally based simulation has been adopted whose single-scattering angular distribution is directly measured. It was found that this small experimental investment significantly improves the simulation’s accuracy.