In this article, the examination and realization of nanometer structures by an atomic force and a scanning tunneling microscope (AFM/STM) is reported. Nanometer structures [etched wires and gratings for distributed feedback (DFB) lasers] were investigated down to a width of 50 nm with respect to profile, structure height, and sidewall roughness. Special DFB gratings for fine tuning of the emission wavelength are analyzed with respect to Fourier components of the periodic structure. The use of a STM and an AFM for low voltage electron-beam lithography of artificial nanometer structures will be demonstrated.