화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.11, No.6, 2514-2518, 1993
Fabrication of Curved Mirrors for Visible Semiconductor-Lasers Using Electron-Beam Lithography and Chemically Assisted Ion-Beam Etching
(Al)GaInP ridge-waveguide lasers with curved dry-etched mirrors have been fabricated which operate in the visible-light regime at a wavelength of 690 nm. High-resolution electron-beam lithography is used to define the mirror shapes in a 25 nm design grid while the rest of the fabrication technology is done conventionally by optical lithography. The mirror patterns are transferred into the underlying epitaxial layers by chemically assisted ion-beam etching. The properties of the laser devices are comparable to devices with cleaved facets. Single-mode behavior is observed up to cw output power levels of 30 mW. The horizontal far-field angle of the emitted light can be influenced by varying the curvature radius of the mirror facets.