화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.11, No.6, 2659-2664, 1993
Edge Location Errors in Cr-Less and rim-Type Phase-Shifting Lithography
When weak phase-shifting concepts, like the Cr-less or rim-type scheme, are applied, the images of feature edges are usually shifted by some amount with respect to their nominal position on the mask. This effect can be compensated by adding a certain bias to feature edges. This article describes some of the results of an investigation that was performed in order to develop design rules for rim-type and Cr-less phase-shifting masks.