Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.2, 616-619, 1994 DOI10.1116/1.587399 Export Citation Improvement in Molecular-Beam Epitaxy Machine Reliability Using Preventive Maintenance Ebert CW, Peticolas LJ, Reynolds CL, Vuong HH Please enable JavaScript to view the comments powered by Disqus.
