화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.2, 1133-1135, 1994
Reflection High-Energy Electron-Diffraction Study of the GaSb Surface During Molecular-Beam Epitaxy
Surface stoichiometry of GaSb during molecular beam epitaxy is studied b using the reflection high-energy electron diffraction technique. This study has shown a desorption energy of 1.47 eV for excessively absorbed Sb atoms on the Sb-stabilized surface. It is also shown that the Ga-stabilized surface easily dissociates Ga atoms from the Sb sublayer to aggregate fine droplets. The activation energy is found to be 1.76 eV for the Ga droplet formation.