Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3118-3137, 1994 DOI10.1116/1.587488 Export Citation Investigation of Electron Source and Ion Flux Uniformity in High Plasma-Density Inductively-Coupled Etching Tools Using 2-Dimensional Modeling Ventzek PL, Grapperhaus M, Kushner MJ Keywords:CHLORINE DISCHARGE;GLOW-DISCHARGE;HYBRID MODEL;RECOMBINATION;ARGON Please enable JavaScript to view the comments powered by Disqus.
