Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3138-3144, 1994 DOI10.1116/1.587489 Export Citation Profile Simulation of Electron-Cyclotron-Resonance Planarization of an Interlevel Dielectric Labun AH Keywords:THIN-FILM DEPOSITION;PLASMA DEPOSITION;ION-TRANSPORT;SIO2 Please enable JavaScript to view the comments powered by Disqus.
