Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3166-3170, 1994 DOI10.1116/1.587493 Export Citation Nanofabrication on Electron-Beam Resist Using Scanning-Tunneling-Microscopy Archer A, Hetrick JM, Nayfeh MH, Adesida I Keywords:LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
