Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3256-3260, 1994 DOI10.1116/1.587509 Export Citation Overlay Accuracy of a Synchrotron-Radiation Stepper Evaluated by 2-Mask Double-Exposure Fukuda M, Suzuki M, Kanai M, Tsuyuzaki H, Shibayama A, Ishihara S Keywords:X-RAY-LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
