Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3285-3288, 1994 DOI10.1116/1.587613 Export Citation Micromechanical Structures for Electron-Beam and Ion-Beam Irradiation Phenomena Ogo I, Macdonald NC Keywords:SILICON Please enable JavaScript to view the comments powered by Disqus.